Optical density follow-up question
I have a similar issue of measuring the density of Ni layer on Tin. Can anyone tell the equipment to be used and give out more the experimental details?
Answer.
There are a number of options that can and have been used for depositing multilayers.
Both materials are conducting and so you have the option of using other measurement techniques of which the most widely used is to measure the resistivity.
The first step in this process is to deposit a series of coatings of differing thickness to span the range from too thin to too thick for your application. On each of these coatings measure both the optical density and resistivity to give calibration curve you can then use the resistivity measurement to control the optical density. This can be repeated for the second coating. There are some options here, one is to take the first metal layer at the thickness/OD that you want and then repeat the series of different thickness coatings of the second layer on top of this background conducting first layer coating. You then will have a calibration curve for the conductivity and OD of both coatings combined with the first layer optimised.
This process can be done for the optical density by measuring the transmittance for the first layer and after optimising the first layer for the combination of layers.
A third method depends on the sources used. If you are using a wire fed resistance heated boat source or an electron beam deposition source this will not be appropriate. However if you are using a sputtering source for either of the coatings it is possible having produced a similar series of thickness coatings to not only have a calibration curve of resistivity vs OD but also to have the voltage/current/pressure/winding speed information for each thickness of coating. As magnetron sputtering sources are very stable many use the voltage/current/pressure/winding speed information directly to deposit a particular thickness coating and do not necessarily measure the coating performance but trust the settings to deliver the correct coating. If your system is not so precise then it would make sense to confirm the deposition by in-vacuum monitoring.
If you are looking to a company that can install a system to monitor OD then I would suggest Mr. Tim Emmerich of NAGY Messsysteme GmbH who would be able to provide a suitable system. Tel: +49-7032-76670 * Fax: +49-7032-72189
emmerich@nagy-instruments.de http://www.NAGY-Instruments.de
I hope this helps. If others have other experiences that provide a different view of the problem please feel free to add them.


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