Deposition sources
There are changes coming in deposition sources largely driven by the new enthusiasm for high rate deposition for photovoltaic devices.
The photovoltaic materials generally have to be deposited to a thickness of greater than 1 micron and so the deposition process has to be fast. Although some of the companies are using sputtering the more successful companies depositing the copper indium gallium diselenide (CIGS) materials are using evaporation. The CIGS compound is evaporated from a series of sources of the individual elements enabling the compound stoichiometry to be graded through the thickness. Although the compound has to be graded through the thickness the requirement is for the thickness and stoichiometry uniformity across the web to be precise. Thus there has been work done to improve the stability of the deposition process and control the thickness uniformity.
There have been two different approaches to the sources. One has been to develop the jet vapour source where the evaporation is done into an enclosed volume where all the internal surfaces are kept hot to prevent condensation and the exit slot is the full width of the substrate. The internal vapour pressure evens out any evaporation variations so that the exiting vapour uniformity is very good.
The second approach has been to take existing high stability vapour sources that have well known characteristics and to use arrays of these sources to provide the uniformity. The Knudsen source is the basis of this type of source. The semiconductor industry has used this type of source for many years and it has been modelled extensively so that the interaction of multiple sources is well understood. The design of these sources has been developed and optimised so that the temperature is controlled to a fraction of a degree and so the evaporation rate is more precisely controlled than most evaporation sources.
What becomes clear is that these sources could be adapted to the deposition of aluminium. The benefits of doing so would be not only that the uniformity of the deposition would be improved but also that the material efficiency would be significantly improved. Currently evaporation from resistance heated boats can have an efficiency of anywhere from 35% up to more than 50% depending on the system design including source to substrate distance and deposition drum size. The vapour jet source, in particular, can have a material deposition efficiency of greater than 95%.
Where these new sources are unproven is in two aspects. One is the replenishment of the sources. Neither of these sources has a replenishment facility. The whole inventory of material has to be loaded and heated at the start. This is because any feed process has to be done via a hole where vapour can escape which is not only a material loss, a cooling point and a possible problem through condensation of the vapour that could close up the hole causing feeding problems. The Knudsen sources can usually hold sufficient material for several deposition runs to be completed. This leads to the second area of process uncertainty which is that of source cooling. At the end of the first deposition run the source needs to be cooled to a safe temperature for the system to be vented. As these sources are designed for temperature uniformity they usually include radiation shielding which both limits the energy losses but also slows down the cooling because of this minimisation of heat losses. In the past gas quenching has been used to accelerate the cooling process. In some systems the need for cooling the sources has been followed by using load locks for the un-wind and re-wind rolls with the main vessel kept under vacuum for the multiple depositions the inventory of the source can allow. As the material efficiency is so high the need for shield cleaning is reduced and so keeping the main vessel under vacuum is possible.
Another advantage of using this different evaporation source is that the range of materials that can be evaporated is increased. It has always been one of the limitations of resistance heated evaporation sources that the range of materials is very limited. Sidrabe have developed an alternative source where they extended the range of materials by using tungsten rods as the core of the evaporator and refractory materials for the enclosure.
I hope this gives a glimpse of what is coming. It may take a few years for these developments to filter through to the aluminium evaporators but it will eventually be adopted. As the material efficiency can be improved so much the energy requirement can similarly be reduced and this will become increasingly important as energy process continue to rise.


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